Monolithically Integrated MEMS Resonators and Oscillators in Standard IC Technology

Bichoy Bahr, MIT

Bichoy Bahr received the BSc and MSc degree with honors in 2008 and 2012, both in electrical engineering, from Ain Shams University, Cairo, Egypt. He received the PhD degree from MIT in 2016. Dr. Bahr worked as an Analog/Mixed Signal and MEMS Modeling/Design Engineer at MEMS Vision, Egypt from 2009 to 2012. He has been with the HybridMEMS group at MIT since September, 2012, where he developed unreleased CMOS-MEMS resonators and GaN MMIC oscillators. He will be joining Texas Instruments, Dallas, TX in June, 2016.

Frequency sources and high-Q filters based on mechanical resonators are essential for analog and digital electronics. Battery operated wireless devices continuously demand for reduction in power and size, dictating monolithic integration of resonators in standard IC technologies. This talk presents the theoretical development and practical realization of unreleased GHz MEMS resonators based on phononic crystals and waveguides in standard CMOS technology, with record breaking foxQ~4.85x10^13. Also, adopting piezoelectric transduction, the first monolithic MEMS-based oscillator in GaN MMIC technology will be presented.

Monolithically Integrated MEMS Resonators and Oscillators in Standard IC Technology

Speaker

Abstract